Name: 非接触式方阻成像仪EddyCus TF Map
Brand: 昊量光电
Availability: InStock

品牌	昊量光电	价格区间	面议
产地类别	国产	应用领域	电子/电池,汽车及零部件,综合

非接触式方阻成像仪EddyCus TF Map

EddyCus TF Map 2530SR是一种非接触式薄层电阻映射系统。该设备配备了一个运动的涡流传感器，每次扫描可测量高达90000 (300 x 300)测量点的方块电阻。由于这种技术不需要与标本进行物理接触，该设备可以在飞行运动中进行测量。此外，非接触式单点方阻测试仪具有很高的准确性，因为它是独立于任何接触质量。非接触式薄膜方块电阻测量仪样品中测量点的高密度确保了没有遗漏任何效果或缺陷。此外，综合分析功能支持生产和研发实验室中各种薄膜的系统质量保证。

非接触式方阻成像仪EddyCus TF Map主要测试对象：

镀膜建筑玻璃，如LowE
显示器，触摸屏和平板显示器
OLED和LED
智能玻璃
石墨烯层
光伏晶圆和电池
半导体晶片
金属化层和晶圆金属化
电池电极
导电涂布纸和导电纺织品

非接触式方阻成像仪的规格：

Measurement technology	Non-contact eddy current sensor
substrates	Wafer, glass, foils etc.
Max. scanning area	12 inch / 300 mm x 300 mm (larger upon request)
Edge effect correction / exclusion	2 – 10 mm (depending on size, range, setup and requirements)
Max. sample thickness / sensor gap	3 / 5 / 10 / 15 mm (defined by the thickest sample)
Thickness measurement of metal films (e.g. aluminum, copper)	2 nm – 2 mm (in accordance with sheet resistance ())
Scanning pitch	1 / 2.5 / 5 / 10 / 25 mm (other upon request)
Measurement points per time (square shaped samples)	100 measurement points in 0.5 minutes 10,000 measurement points in 3 minutes
Scanning time	8 inch / 200 mm x 200 mm in 1 to 10 minutes (1 – 10 mm pitch) 12 inch / 300 mm x 300 mm in 2 to 6 minutes (2.5 – 25 mm pitch)
Device dimensions (w/h/d)	31.5" x 19.1" x 33.5" / 785 mm x 486 mm x 850 mm
Weight	90 kg
Further available features	Metal thickness imaging, anisotropy and sheet resistance sensor

	VLSR	LSR	MSR	HSR	VHSR
	6 decades are measurable by one sensor, but with slightly affected accuracy
Range [Ohm/sq]	0.0001 – 0.1	0.1 – 10	0.1 – 100	10 – 2,000	1,000 – 200,000
Accuracy / Bias	± 1%			± 1 – 3%	± 3 – 5%
Repeatability (2σ)	< 0.5%			< 1%	< 0.5%
VLSR – Very Low Sheet Resistance , LSR – Low Sheet Resistance , MSR – Medium Sheet Resistance , HSR – High Sheet Resistance , VHSR – Very High Sheet Resistance

非接触式方阻成像仪EddyCus TF Map

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